Sebania Libertino
Istituto per la Microelettronica e Microsistemi Consiglio Nazionale delle Ricerche
125 papers found
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Migration and interaction properties of ion beam generated point defects in c-Si
UploadEvolution of interstitial- and vacancy-type defects upon thermal annealing in ion-implanted Si
Download from www.researchgate.netEvolution from point to extended defects in ion implanted silicon
Download from www.researchgate.netDepth profiles of vacancy- and interstitial-type defects in MeV implanted Si
Download from www.researchgate.netIon implantation doping of Si for optoelectronic applications
Download from www.researchgate.netLifetime control in silicon devices by voids induced by He ion implantation
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