Stefano Dallorto - Dissemin

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All papers authored by Stefano Dallorto

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2019 Stefano Dallorto

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, Andy Goodyear, Mike Cooke, Julia E. Szornel, Craig Ward, Christoph Kastl

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, Adam Schwartzberg

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, Ivo W. Rangelow

ORCID

, Stefano Cabrini

Atomic layer etching of SiO₂ with Ar and CHF₃ plasmas: A self‐limiting process for aspect ratio independent etching

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