Tomáš Kozák
0000-0002-5046-7253
25 papers found
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Plasma parameters in positive voltage pulses of bipolar HiPIMS discharge determined by Langmuir probe with a sub-microsecond time resolution
Ion energy distributions at substrate in bipolar HiPIMS: effect of positive pulse delay, length and amplitude
High-rate reactive high-power impulse magnetron sputtering of transparent conductive Al-doped ZnO thin films prepared at ambient temperature
The influence of positive pulses on HiPIMS deposition of hard DLC coatings
Identification of electrical properties in individual thickness layers in aluminium-doped zinc oxide films sputtered at 100 °C
In-Ga-Zn-O thin films with tunable optical and electrical properties prepared by high-power impulse magnetron sputtering
Influence of Oxygen on the Resistivity of Co-Sputtered Transparent AZO Films
Controlled reactive HiPIMS—effective technique for low-temperature (300 °C) synthesis of VO2films with semiconductor-to-metal transition
Dynamics of processes during the deposition of ZrO2 films by controlled reactive high-power impulse magnetron sputtering: A modelling study
Optimization of sputtered ZnO transparent conductive seed layer for flexible ZnO-nanorod-based devices
Relationships between the distribution of O atoms on partially oxidized metal (Al, Ag, Cu, Ti, Zr, Hf) surfaces and the adsorption energy: A density-functional theory study
A Comprehensive Chemical Model for the Splitting of CO2in Non-Equilibrium Plasmas
Plasma based CO2 and CH4 conversion: A modeling perspective
High-Rate Reactive High-Power Impulse Magnetron Sputter Deposition: Principles and Applications
A parametric model for reactive high-power impulse magnetron sputtering of films
CO2 Conversion in a Microwave Plasma Reactor in the Presence of N2: Elucidating the Role of Vibrational Levels
Benefits of the controlled reactive high-power impulse magnetron sputtering of stoichiometric ZrO2 films
Plasma-based conversion of CO2: current status and future challenges
Dimension reduction of non-equilibrium plasma kinetic models using principal component analysis
Evaluation of the energy efficiency of CO2conversion in microwave discharges using a reaction kinetics model
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