Cormac Corr - Dissemin

Papers authored by Cormac Corr

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2007 C. S. Corr

, J. Zanger, R. W. Boswell, C. Charles

Ion beam formation in a low-pressure geometrically expanding argon plasma

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C. S. Corr

, R. W. Boswell

High-beta plasma effects in a low-pressure helicon plasma

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G. A. Curley, D. Marić, J.-P. Booth, C. S. Corr

, P. Chabert, J. Guillon

Negative ions in single and dual frequency capacitively coupled fluorocarbon plasmas

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N. Plihon, P. Chabert, C. S. Corr

Experimental investigation of double layers in expanding plasmas

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2006 P. Chabert, N. Plihon, C. S. Corr

, J.-L. Raimbault, A. J. Lichtenberg

Equilibrium model for two low-pressure electronegative plasmas connected by a double layer

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C. S. Corr

, N. Plihon, P. Chabert

Transition from unstable electrostatic confinement to stable magnetic confinement in a helicon reactor operating with Ar/SF6 gas mixtures

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Jean-Paul Booth, Corr Cormac, Cormac S. Corr

, Garrett A. Curley, Jacques Jolly, Jean Guillon, Tomas Foldes

Fluorine negative ion density measurement in a dual frequency capacitive plasma etch reactor by cavity ring-down spectroscopy

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Jean-Paul Booth, Cormac Corr

Metastable CF and CF2molecules in CF4inductively-coupled plasmas

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S. Guilet, S. Bouchoule, C. Jany, C. S. Corr

, P. Chabert

ICP etching process development based on Cl-2/H-2 chemistry and adapted to non-thermalized InP wafers for the realisation of high aspect ratio and vertical sidfewall deep ridge waveguides and buried heterostructures

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S. Guilet, S. Bouchoule, C. Jany, C. S. Corr

, P. Chabert

Optimization of a Cl[sub 2]–H[sub 2] inductively coupled plasma etching process adapted to nonthermalized InP wafers for the realization of deep ridge heterostructures

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S. Guilet, S. Bouchoule, C. Jany, C. S. Corr

, P. Chabert

ICP etching process development based on Cl2/H2 chemistry and adapted to non-thermalized InP wafers for the realisation of high aspect ratio and vertical sidfewall deep ridge waveguides and buried heterostructures

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2005 S. Dine, J.-P. Booth, G. A. Curley, C. S. Corr

, J. Jolly, J. Guillon

A novel technique for plasma density measurement using surface-wave transmission spectra

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N. Plihon, C. S. Corr

, P. Chabert, J.-L. Raimbault

Periodic formation and propagation of double layers in the expanding chamber of an inductive discharge operating in Ar∕SF6 mixtures

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N. Plihon, C. S. Corr

, P. Chabert

Double layer formation in the expanding region of an inductively coupled electronegative plasma

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C. S. Corr

, P. G. Steen, W. G. Graham

Temporal phenomena in inductively coupled chlorine and argon–chlorine discharges

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2004 C. S. Corr

, N. Plihon, P. Chabert, O. Sutherland, Rod W. Boswell

Spatially limited ion acoustic wave activity in low-pressure helicon discharges

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2003 C. S. Corr

, P. G. Steen, W. G. Graham

Instabilities in an inductively coupled oxygen plasma

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2002 Sa A. Rizvi, Pd D. Maguire

, Cmo M. O. Mahony, Oa A. Okpalugo, Cs S. Corr

, Wg G. Graham, Sm M. Morley

Correlation of optical emission and ion flux with GaN etch rate in inductively coupled Ar/Cl2 plasma etching

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Papers authored by Cormac Corr