Stefan Zöllner - Dissemin

All papers authored by Stefan Zöllner

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2016 John Hart, Ramsey Hazbun, David Eldridge, Ryan Hickey, Nalin Fernando, Thomas Adam, Stefan Zollner

, James Kolodzey

Tetrasilane and digermane for the Ultra-high vacuum chemical vapor deposition of SiGe alloys

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This paper is available in a repository.

2015 Miri Choi, Chungwei Lin, Matthew Butcher, Cesar Rodriguez, Qian He, Agham B. Posadas, Albina Y. Borisevich, Stefan Zollner

, Alexander A. Demkov

Quantum confinement in transition metal oxide quantum wells

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This paper is made freely available by the publisher.

2014 Andrew O'Hara, Timothy N. Nunley

, Agham B. Posadas, Stefan Zollner

, Alexander A. Demkov

Electronic and optical properties of NbO2

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Christian J. Zollner, Travis I. Willett Gies, Stefan Zollner

, Sukgeun Choi

Infrared to vacuum-ultraviolet ellipsometry studies of spinel (MgAl2O4)

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2012 S. G. Choi, J. Hu, L. S. Abdallah, M. Limpinsel, Y. N. Zhang

, S. Zollner

, R. Q. Wu, M. Law

Pseudodielectric function and critical-point energies of iron pyrite

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2008 X. Luo, A. A. Demkov, D. Triyoso, P. Fejes, R. Gregory, S. Zollner

Combined experimental and theoretical study of thin hafnia films

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B. Frank Yang, R. Takalkar, Z. Ren, L. Black, A. Dube, J. W. Weijtmans, J. Li, J. B. Johnson, J. Faltermeier, B. Yang, A. Madan, Z. Zhu, A. Turansky, G. Xia, A. Chakravarti and 24 other authors

High-performance nMOSFET with in-situ phosphorus-doped embedded Si:C (ISPD eSi:C) source-drain stressor

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H. Bentmann, Alexander A. Demkov, R. Gregory, S. Zollner

Electronic, optical, and surface properties of PtSi thin films

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2007 Kyuh Wan Chang, Scott Bolton, Marc Rossow, Rich Gregory, Jack Jiang, Dharmesh Jawarani, Stefan Zollner

, Dean Denning, Jon Cheek

Implementing an In Situ Surface Preparation Prior to Ni Deposition for Ni Salicide Processes

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P. Grudowski, V. Dhandapani, S. Zollner

, D. Goedeke, K. Loiko, D. Tekleab, V. Adams, G. Spencer, H. Desjardins, L. Prabhu, R. Garcia, M. Foisy, D. Theodore, M. Bauer, D. Weeks and 3 other authors

An Embedded Silicon-Carbon S/D Stressor CMOS Integration on SOI with Enhanced Carbon Incorporation by Laser Spike Annealing

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Stefan Zollner

, Paul Grudowski, Aaron Thean, Dharmesh Jawarani, Gauri Karve, Ted White, Scott Bolton, Heather Desjardins, Murshed Chowdhury, Kyuhwan Chang, Mo Jahanbani, R. Noble, L. Lovejoy, M. Rossow, Dean Denning and 16 other authors

Dual Silicide SOI CMOS Integration with Low-Resistance PtSi PMOS Contacts

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Xiang-Zheng Bo, Laegu Kang, T. Luo, K. Junker, S. Zollner

, G. Spencer, V. Kolagunta, J. Cheek

High Performance NMOS Transistors for 45nm SOI Technologies

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Stefan Zollner

, Wentao Qin, Richard B. Gregory, N. V. Edwards, Kurt Junker, Thomas E. Tiwald

Stress-induced anisotropy of graphitelike amorphous carbon

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R. B. Gregory, D. H. Triyoso, R. I. Hegde, J. K. Schaeffer, P. L. Fejes, S. Zollner

, Z. J. Yu, X.-D. Wang

Impact of additives on the microstructure of hafnium-based high-k dielectrics

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Stefan Zollner

, Richard B. Gregory, M. L. Kottke, Victor Vartanian, Xiang-Dong Wang, David Theodore, P. L. Fejes, J. R. Conner, Mark Raymond, Xiaoyan Zhu, Dean Denning, Scott Bolton, Kyuhwan Chang, Ross Noble, Mohamad Jahanbani and 16 other authors

Metrology Of Silicide Contacts For Future CMOS

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2006 Victor Vartanian, Stefan Zollner

, A. V.-Y. Thean, T. White, B.-Y. Nguyen, L. Prabhu, D. Eades, S. Parsons, H. Desjardins, K. Kim, Z.-X. Jiang, V. Dhandapani, J. Hildreth, R. Powers, G. Spencer and 8 other authors

Metrology Challenges for 45-nm Strained-Si Device Technology

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