Seiji Samukawa - Dissemin

Papers authored by Seiji Samukawa

This paper was not found in any repository, but could be made available legally by the author.

2014 Xun Gu, Yoshiyuki Kikuchi, Toshihisa Nozawa, Seiji Samukawa

A new metallic complex reaction etching for transition metals by a low-temperature neutral beam process

Upload

This paper is available in a repository.

Nguyen Van Toan, Tomohiro Kubota, Halubai Sekhar, Seiji Samukawa

, Takahito Ono

Mechanical quality factor enhancement in a silicon micromechanical resonator by low-damage process using neutral beam etching technology

Download from www.researchgate.net

Chi-Hsien Huang

, Ching-Yuan Su, Chao-Sung Lai, Yen-Cheng Li, Seiji Samukawa

Ultra-low-damage radical treatment for the highly controllable oxidation of large-scale graphene sheets

Download from www.researchgate.net

C. Thomas, Y. Tamura, T. Okada, A. Higo, S. Samukawa

Estimation of activation energy and surface reaction mechanism of chlorine neutral beam etching of GaAs for nanostructure fabrication

Upload

Mohammad Maksudur Rahrnan, Mohammad Maksudur Rahman, Makoto Igarashi, Wei Guo Hu, Mohd, Mohd Erman Syazwan, Takeru Okada, Yusuke Hoshi, Noritaka Usami, Seiji Samukawa

, Ieee

Effect of Miniband Formation in a Quantum Dot Super Lattice Fabricated by Combination of Bio-Template and Neutral Beam Etching for High Efficiency Quantum Dot Solar Cells

Download from www.researchgate.net

Xun Gu, Yoshiyuki Kikuchi, Toshihisa Nozawa, Seiji Samukawa

, Ieee

A novel metallic complex reaction etching for transition metal and magnetic material by low-temperature and damage-free neutral beam process for non-volatile MRAM device applications

Upload

Takuya Fujii, Mohd Erman Syazwanl, Takeru Okadal, Takeru Okada, Mohd Erman Syazwan, Taiga Isoda, Hirotaka Endo, Mohammad Maksudur Rahman, Kohei Ito, Seiji Samukawa

, Ieee

Germanium nano disk array fabrication by combination of bio template and neutral beam etching for solar cell application

Upload

C. Thomas, Y. Tamura, M. E. Syazwan, A. Higo, S. Samukawa

Oxidation states of GaAs surface and their effects on neutral beam etching during nanopillar fabrication

Upload

Seiji Samukawa

Neutral beam technology — Defect-free nanofabrication for novel nanomaterials and nanodevices

Upload

Nguyen Van Toan, Tomohiro Kubota, Halubai Sekhar, Halubai Seknar, Seiji Samukawa

, Takahito Ono, Ieee

Fabrication and evaluation of silicon micromechanical resonator using neutral beam etching technology

Download from www.researchgate.net

Yoshiyuki Kikuchi, Yasuaki Sakakibara, Seiji Samukawa

Large-radius neutral beam enhanced chemical vapor deposition process for non-porous ultra-low-k SiOCH

Upload

Yoshiyuki Kikuchi, Akira Wada, Takuya Kurotori, Masanori Nakano, Kumi Y. Inoue, Tomokazu Matsue, Toshihisa Nozawa, Seiji Samukawa

Conductive amorphous hydrocarbon film for bio-sensor formed by low temperature neutral beam enhanced chemical vapor deposition

Upload

Seiji Samukawa

Feature Profile Evolution in Plasma Processing Using Wireless On-wafer Monitoring System

Upload

Seiji Samukawa

Prediction of Abnormal Etching Profiles in High-Aspect-Ratio Via/Hole Etching Using On-wafer Monitoring System

Upload

This paper was not found in any repository; the policy of its publisher is unknown or unclear.

Seiji Samukawa

, Ieee

Neutral Beam Technology-Defect-free Nanofabrication for Novel Nanomaterials and Nanodevices-

Upload

Seiji Samukawa

On-wafer UV Sensor and Prediction of UV Irradiation Damage

Upload

Takashi Morie, Haichao Liang, Yilai Sun, Takashi Tohara, Makoto Igarashi, Seiji Samukawa

, Ieee

A silicon nanodisk array structure realizing synaptic response of spiking neuron models with noise

Upload

Seiji Samukawa

Introduction

Upload

2013 Rikako Tsukamoto, Maia Godonoga, Ryota Matsuyama, Makoto Igarashi, Jonathan Gardiner Heddle, Seiji Samukawa

, Ichiro Yamashita

Effect of PEGylation on Controllably Spaced Adsorption of Ferritin Molecules

Download from www.researchgate.net

Weiguo Hu, Mohammad Maksudur Rahman, Ming-Yi Lee, YiMing Li, Seiji Samukawa

Simulation study of type-II Ge/Si quantum dot for solar cell applications

Download from www.researchgate.net

Missing publications? Search for publications with a matching author name.

Researcher

Statistics

Refine

Papers authored by Seiji Samukawa