All papers authored by Gregory Herman
Refreshing results…
2021
Gang Wan 
,
John W. Freeland ,
Jan Kloppenburg ,
Guido Petretto ,
Jocienne N. Nelson ,
Ding-Yuan Kuo ,
Cheng-Jun Sun,
Jianguo Wen ,
J. Trey Diulus ,
Gregory S. Herman ,
Yongqi Dong,
Ronghui Kou,
Jingying Sun,
Shuo Chen ,
Kyle M. Shen
and 7 other authors
Download from doi.org
,
John W. Freeland ,
Jan Kloppenburg ,
Guido Petretto ,
Jocienne N. Nelson ,
Ding-Yuan Kuo ,
Cheng-Jun Sun,
Jianguo Wen ,
J. Trey Diulus ,
Gregory S. Herman ,
Yongqi Dong,
Ronghui Kou,
Jingying Sun,
Shuo Chen ,
Kyle M. Shen
and 7 other authors
Download from doi.org
2018
Ryan T. Frederick,
Jenn M. Amador,
Sara Goberna-Ferrón ,
May Nyman ,
Douglas A. Keszler ,
Gregory S. Herman
,
May Nyman ,
Douglas A. Keszler ,
Gregory S. Herman
Mechanistic Study of HafSOx Extreme Ultraviolet Inorganic Resists
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