All papers authored by Alexey Zotovich
Refreshing results…
D. V. Lopaev,
A. V. Volynets,
S. M. Zyryanov,
A. I. Zotovich 
,
A. T. Rakhimov
,
A. T. Rakhimov
Actinometry of O, N and F atoms
Upload
2015
D. I. Astakhov,
W. J. Goedheer,
C. J. Lee,
V. V. Ivanov,
V. M. Krivtsun,
A. I. Zotovich ,
S. M. Zyryanov,
D. V. Lopaev,
F. Bijkerk
,
S. M. Zyryanov,
D. V. Lopaev,
F. Bijkerk
Plasma probe characteristics in low density hydrogen pulsed plasmas
Download from arxiv.org
Z. el Otell,
V. Šamara,
A. Zotovich ,
T. Hansen,
J.-F. de Marneffe,
M. R. Baklanov
,
T. Hansen,
J.-F. de Marneffe,
M. R. Baklanov
Vacuum ultra-violet emission of CF4and CF3I containing plasmas and Their effect on low-k materials
Download from www.researchgate.net
2014
A. Zotovich ,
M. Krishtab,
F. Lazzarino,
M. R. Baklanov
,
M. Krishtab,
F. Lazzarino,
M. R. Baklanov
The chemistry screening for ultra low-k dielectrics plasma etching
Download from www.researchgate.net
Liping Zhang,
Jean-Francois de Marneffe,
Markus H. Heyne ,
Sergej Naumov,
Yiting Sun,
Alexey Zotovich ,
Ziad el Otell,
Ziad el Otell,
Felim Vajda,
Stefan De Gendt,
Mikhail R. Baklanov
,
Sergej Naumov,
Yiting Sun,
Alexey Zotovich ,
Ziad el Otell,
Ziad el Otell,
Felim Vajda,
Stefan De Gendt,
Mikhail R. Baklanov
Improved Plasma Resistance for Porous Low-k Dielectrics by Pore Stuffing Approach
Download from www.researchgate.netMissing publications? Search for publications with a matching author name.