Dmitry Lopaev - Dissemin

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All papers authored by Dmitry Lopaev

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2018 Dmitry V. Lopaev

ORCID

, Sergey M. Zyryanov, Alexey I. Zotovich

ORCID

, Tatyana V. Rakhimova, Yury A. Mankelevich, Alexander T. Rakhimov, Mikhail R. Baklanov

Synergistic effect of VUV photons and F atoms on damage and etching of porous organosilicate films

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