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The 2022 Plasma Roadmap: low temperature plasma science and technology
UploadErosion of focus rings in capacitively coupled plasma etching reactors
UploadTransients using low-high pulsed power in inductively coupled plasmas
Download from iopscience.iop.orgPower matching to pulsed inductively coupled plasmas
UploadChemical kinetics in an atmospheric pressure helium plasma containing humidity
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