Jan Benedikt - Dissemin

Papers authored by Jan Benedikt

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2014 Simon Schneider, Mario Dünnbier, Simon Hübner, Stephan Reuter

, Jan Benedikt

Atomic nitrogen: a parameter study of a micro-scale atmospheric pressure plasma jet by means of molecular beam mass spectrometry

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D. Nečas, V. Čudek, J. Vodák, M. Ohlídal, P. Klapetek, J. Benedikt

, K. Rügner, L. Zajíčková

Mapping of properties of thin plasma jet films using imaging spectroscopic reflectometry

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Christian Maszl

, Wolfgang Breilmann, Lars Berscheid, Jan Benedikt

, Achim von Keudell

Fast Time Resolved Techniques as Key to the Understanding of Energy and Particle Transport in HPPMS-Plasmas

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K. Rügner, R. Reuter, A. von Keudell, J. Benedikt

The effect of surface reactions of O, O3and N on film properties during the growth of silica-like films

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Christian Maszl

, Wolfgang Breilmann, Jan Benedikt

, Achim von Keudell

Origin of the energetic ions at the substrate generated during high power pulsed magnetron sputtering of titanium

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2013 W. Breilmann, C. Maszl

, J. Benedikt

, A. von Keudell

Dynamic of the growth flux at the substrate during high-power pulsed magnetron sputtering (HiPIMS) of titanium

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J. Benedikt

, D. Ellerweg, S. Schneider, K. Rügner, Reuter R., H. Kersten, T. Benter

Mass spectrometry of positive ions and neutral species in the effluent of an atmospheric pressure plasma with hexamethyldisiloxane and oxygen

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Felix Mitschker, Marina Prenzel, Jan Benedikt

, Christian Maszl

, Achim von Keudell

Time resolved measurement of film growth during reactive high power pulsed magnetron sputtering (HIPIMS) of titanium nitride

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Felix Mitschker, Marina Prenzel, Jan Benedikt

, Christian Maszl

, Achim von Keudell

Time-resolved measurement of film growth during high-power pulsed magnetron sputtering (HIPIMS) of titanium

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Carles Corbella, Simon Grosse-Kreul, Oliver Kreiter, Teresa de los Arcos, Jan Benedikt

, Achim von Keudell

Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces

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2012 Fiorenza Fanelli, Jan Benedikt

Special Issue on Cold Atmospheric Plasmas for Thin Films and Nanomaterials

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R. Reuter, N. Gherardi, J. Benedikt

Effect of N2 dielectric barrier discharge treatment on the composition of very thin SiO2-like films deposited from hexamethyldisiloxane at atmospheric pressure

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D. Ellerweg, A. von Keudell, J. Benedikt

Unexpected O and O3production in the effluent of He/O2microplasma jets emanating into ambient air

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Felix Mitschker, Marina Prenzel, Jan Benedikt

, Achim von Keudell, Keudell

Time-resolved measurement of film growth during high-power pulsed magnetron sputtering (HPPMS) of titanium : the rotating shutter concept

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Rüdiger Reuter, Katja Rügner, Dirk Ellerweg, Teresa De los Arcos, Achim von Keudell, Jan Benedikt

The role of oxygen and surface reactions in the deposition of silicon oxide like films from HMDSO at atmospheric pressure

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Tobias Krähling, Dirk Ellerweg, Jan Benedikt

The influence of the ionizer geometry on the absolute density calibration of reactive neutral species in a molecular beam mass spectrometry

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Dirk Hegemann

, Enrico Körner, Shang Chen, Jan Benedikt

, Achim von Keudell

Functional plasma polymers deposited in capacitively and inductively coupled plasmas

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Jan Benedikt

, Ante Hecimovic, Dirk Ellerweg, Achim von Keudell

Quadrupole mass spectrometry of reactive plasmas

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2011 Simon Schneider, Jan-Wilm Lackmann, Dirk Ellerweg, Benjamin Denis, Franz Narberhaus, Julia Elisabeth Bandow, Jan Benedikt

The role of VUV radiation in the inactivation of bacteria with an atmospheric pressure plasma jet

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B. Niermann, R. Reuter, T. Kuschel, J. Benedikt

, M. Böke, J. Winter

Argon metastable dynamics in a filamentary jet micro-discharge at atmospheric pressure

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Papers authored by Jan Benedikt