Papers authored by Masashi Kato
Refreshing results…
2002
M. Kato 
,
F. Sobue,
M. Ichimura,
E. Arai,
N. Yamada,
Y. Tokuda,
T. Okumura
,
F. Sobue,
M. Ichimura,
E. Arai,
N. Yamada,
Y. Tokuda,
T. Okumura
Deep center passivation in 3C-SiC by hydrogen plasma with a grid for damage suppression
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