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All papers authored by Huai Huang

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2017 C.-C. Yang

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, T. Standaert, H. Huang

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, M. Ali, G. Lian, D. Edelstein, G. Bonilla

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Line Resistance Reduction in Advanced Copper Interconnects

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John N. Myers

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, Xiaoxian Zhang

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, Huai Huang

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, Hosadurga Shobha, Alfred Grill

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ORCID

SFG analysis of the molecular structures at the surfaces and buried interfaces of PECVD ultralow-dielectric constant pSiCOH: Reactive ion etching and dielectric recovery

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This paper was not found in any repository, but could be made available legally by the author.

2016 Xiaoxian Zhang

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, John N. Myers

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, Huai Huang

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, Hosadurga Shobha, Zhan Chen

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ORCID

SFG analysis of the molecular structures at the surfaces and buried interfaces of PECVD ultralow-dielectric constant pSiCOH

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2008 Hualiang Shi, Junjing Bao, Huai Huang

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, Junjun Liu, Ryan Scott Smith, Yangming Sun, Paul S. Ho, Michael L. McSwiney, Mansour Moinpour, Grant M. Kloster

Dielectric Recovery of Plasma Damaged Organosilicate Low-k Films

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Bin Li, Huai Huang

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, Qiu Zhao, Zhiquan Luo, Jang-Hi Im, Paul S. Ho, Min Kyoo Kang, Rui Huang, Michael W. Cresswell

Mechanical Characterization of High Aspect Ratio Silicon Nanolines

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