All papers authored by Bruno Lee Sang
Refreshing results…
2015
Bruno Lee Sang 
,
Bruno Lee Sang,
Marie-Josée Gour,
Abdelatif Jaouad,
Serge Ecoffey,
Maxime Darnon ,
Benattou Sadani,
Abdelkader Souifi,
Dominique Drouin
,
Bruno Lee Sang,
Marie-Josée Gour,
Abdelatif Jaouad,
Serge Ecoffey,
Maxime Darnon ,
Benattou Sadani,
Abdelkader Souifi,
Dominique Drouin
Inductively coupled plasma etching of ultra-shallow Si3N4 nanostructures using SF6/C4F8 chemistry
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