Purpose: The purpose of this article is to characterize and compare the structure, mechanical and tribological properties of low friction DLC and TiC thin films deposited on the austenitic steel X6CrNiMoTi17-12-2 substrate. Design/methodology/approach: In the research, the samples of the DLC and TiC thin films with transition hard AlCrN interlayer deposited by magnetron sputtering and PACVD technology respectively were used. Observations of topography were made using a scanning electron microscope (SEM), and the atomic force microscope (AFM). The structure of samples was performed using a Raman microscope. The microhardness tests of thin films were made by Oliver & Phare method. Findings: Studies confirmed that the combination of research SEM and AFM provide crucial information on the structure and topography of the samples. It was possible to obtain information about the topography parameters and allow for the assessment of morphology and quality of the tested coatings. Study of the structure using Raman spectroscopy revealed the band corresponding to the DLC and TiC thin films. Practical implications: The current application areas for low friction thin films are constantly growing, and the intensive development of techniques requires the use of new technologies what leads to the production of the specific surface layer and a thorough examination. Originality/value: Growing area of low friction coatings with specific properties requires the use of specialized tools aimed at assessing the topography and structures which are responsible for tribological properties.