Published in
American Institute of Physics, Journal of Applied Physics, 13(122), p. 135705
DOI: 10.1063/1.4991472
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Quantification of local strain distributions in nanoscale strained SiGe FinFET structures
Journal article published in 2017 by
Shogo Mochizuki,
Conal E. Murray,
Anita Madan,
Teresa Pinto,
Yun-Yu Wang,
Juntao Li,
Weihao Weng,
Hemanth Jagannathan,
Yasuhiko Imai,
Shigeru Kimura 
,
Shotaro Takeuchi ,
Akira Sakai
,
Shotaro Takeuchi ,
Akira Sakai
This paper was not found in any repository, but could be made available legally by the author.
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