Published in
Taylor and Francis Group, Science and Technology of Advanced Materials, 1(18), p. 654-663, 2017
DOI: 10.1080/14686996.2017.1366815
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Effect of slurry composition on the chemical mechanical polishing of thin diamond films
Journal article published in 2017 by
Jessica M. Werrell 
,
Soumen Mandal ,
Evan L. H. Thomas ,
Emmanuel B. Brousseau ,
Ryan Lewis,
Paola Borri ,
Philip R. Davies ,
Oliver A. Williams
,
Soumen Mandal ,
Evan L. H. Thomas ,
Emmanuel B. Brousseau ,
Ryan Lewis,
Paola Borri ,
Philip R. Davies ,
Oliver A. Williams
This paper is made freely available by the publisher.
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