Published in
American Institute of Physics, Journal of Applied Physics, 5(122), p. 053301, 2017
DOI: 10.1063/1.4996998
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Effects of the wall boundary conditions of a showerhead plasma reactor on the uniformity control of RF plasma deposition
Journal article published in 2017 by
Ho Jun Kim,
Hae June Lee 
This paper was not found in any repository, but could be made available legally by the author.
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