Published in
2016 IEEE International 3D Systems Integration Conference (3DIC)
DOI: 10.1109/3dic.2016.7970022
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New concept of TSV formation methodology using Directed Self-Assembly (DSA)
Proceedings article published in 2016 by
Takafumi Fukushima 
,
Mariappan Murugesan,
Shin Ohsaki,
Hiroyuki Hashimoto,
Jichoel Bea,
Kang-Wook Lee,
Tetsu Tanaka,
Mitsumasa Koyanagi
,
Mariappan Murugesan,
Shin Ohsaki,
Hiroyuki Hashimoto,
Jichoel Bea,
Kang-Wook Lee,
Tetsu Tanaka,
Mitsumasa Koyanagi
