Published in
2017 International Conference of Microelectronic Test Structures (ICMTS)
DOI: 10.1109/icmts.2017.7954258
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Electrical test structures for verifying continuity of ultra-thin insulating and conducting films
Proceedings article published in 2017 by
Sourish Banerjee 
,
Rik van der Velde,
Mengdi Yang,
Jurriaan Schmitz,
Alexey Y. Kovalgin
,
Rik van der Velde,
Mengdi Yang,
Jurriaan Schmitz,
Alexey Y. Kovalgin
