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American Institute of Physics, Applied Physics Letters, 23(99), p. 234102

DOI: 10.1063/1.3665956

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Silicon two-dimensional phononic crystal resonators using alternate defects

Journal article published in 2011 by Nan Wang, Fu-Li Hsiao, Moorthi Palaniapan, Chengkuo Lee ORCID
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

We present the numerical and experimental investigations of micromechanical resonators made by creating alternate defects with different central-hole radii (r′) in a two-dimensional (2-D) phononic crystal (PnC) slab. The PnC structures were fabricated by etching a square array of cylindrical air holes in a 10 μm thick free-standing silicon plate using a CMOS-compatible process. Preliminary experimental results show that the performance of the PnC resonators in terms of resonant frequency, Q factor, and insertion loss (IL) is highly dependent on r′. A Q factor of more than 3000 is achieved for the case of r′ = 6 μm while all the designed resonators with alternate defects have higher Q factor and lower IL than the resonators based on the normal Fabry-Perot structure due to the reduction in the mode mismatch.