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American Institute of Physics, Applied Physics Letters, 16(102), p. 161912

DOI: 10.1063/1.4803048

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Polarization-sensitive microelectromechanical systems based tunable terahertz metamaterials using three dimensional electric split-ring resonator arrays

This paper is available in a repository.
This paper is available in a repository.

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Abstract

We present the design, simulation, fabrication, and characterization of structurally reconfigurable metamaterials showing terahertz frequency tunability with a polarization-sensitivity. The proposed metamaterial structures employ deformable microelectromechanical system based curved cantilevers for tuning the resonance frequency of the electric split-ring resonators. The resonance frequency is observed to be either tunable or non-tunable with the electric field of the incident wave, which is perpendicular or parallel to the split gap of the electric split-ring resonators. This polarization-sensitive characteristic has been demonstrated by both the electromagnetic simulation and the experimental measurement. The observed polarization-sensitive tunability could be used for the development of polarization sensitive and insensitive THz polarimetric devices.