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nano Online

DOI: 10.1515/nano.11671_2015.136

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Transparent and flexible capacitors based on nanolaminate Al2O3/TiO2/Al2O3

Journal article published in 2015 by Guozhen Zhang, Hao Wu, Chao Chen, Ti Wang, Jin Yue ORCID, Chang Liu
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

Abstract Transparent and flexible capacitors based on nanolaminate Al 2 O 3 /TiO 2 /Al 2 O 3 dielectrics have been fabricated on indium tin oxide-coated polyethylene naphthalate substrates by atomic layer deposition. A capacitance density of 7.8 fF/μm 2 at 10 KHz was obtained, corresponding to a dielectric constant of 26.3. Moreover, a low leakage current density of 3.9 × 10 −8 A/cm 2 at 1 V has been realized. Bending test shows that the capacitors have better performances in concave conditions than in convex conditions. The capacitors exhibit an average optical transmittance of about 70% in visible range and thus open the door for applications in transparent and flexible integrated circuits.