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American Institute of Physics, Review of Scientific Instruments, 6(88), p. 063306

DOI: 10.1063/1.4985547

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Ion mass and energy selective hyperthermal ion-beam assisted deposition setup

Journal article published in 2017 by J. W. Gerlach, P. Schumacher, M. Mensing ORCID, S. Rauschenbach, I. Cermak, B. Rauschenbach ORCID
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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