Published in
American Institute of Physics, Applied Physics Letters, 19(110), p. 191604
DOI: 10.1063/1.4983380
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Impurity gettering effect of atomic layer deposited aluminium oxide films on silicon wafers
Journal article published in 2017 by
A. Y. Liu 
,
D. Macdonald
,
D. Macdonald
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
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