Surface structure and electronic properties of In20 3(111) single-crystal thin films grown on V-stabilized Zr0 2(1 11) was observed. The surface geometrical structure was examined by atomic force microscopy (AFM), scanning tunneling microscope (STM) and low electron energy diffraction (LEED). The surface structure, however, provides in turn the essential basis for understanding the surface electronic properties such as the band offset, which plays an important role in determining the potential performance and stability of devices. The examination of valence band and conduction band spectra by HXPS adds further weight to the conclusion that the electron accumulation at the surface is an intrinsic property of In 2O3.