Published in
2016 46th European Solid-State Device Research Conference (ESSDERC)
DOI: 10.1109/essderc.2016.7599604
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Performance and layout effects of SiGe channel in 14nm UTBB FDSOI: SiGe-first vs. SiGe-last integration
Proceedings article published in 2016 by
R. Berthelon,
F. Andrieu,
P. Perreau,
E. Baylac,
A. Pofelski,
E. Josse,
D. Dutartre,
A. Claverie,
M. Haond
