Three-Dimensional Simulation of DRIE Process Based on the Narrow Band Level Set and Monte Carlo Method
Journal article published in 2018 by
Jia-Cheng Yu,
Zai-Fa Zhou,
Jia-Le Su,
Chang-Feng Xia,
Xin-Wei Zhang,
Zong-Ze Wu,
Qing-An Huang 
This paper is made freely available by the publisher.
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