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Advances in Metrology for X-Ray and EUV Optics VI

DOI: 10.1117/12.2238128

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Nanometer accuracy with continuous scans at the ALBA-NOM

Proceedings article published in 2016 by Josep Nicolas ORCID, Pablo Pedreira ORCID, Igors Šics, Claudio Ramírez, Juan Campos
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

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