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EDP Sciences, Journal sur l'enseignement des sciences et technologies de l'information et des systèmes, (16), p. 1011

DOI: 10.1051/j3ea/20171011

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Elaboration de couches minces de Silicium sur isolant (SOI) par le procédé Smart-CutTM

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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