Published in
Nature Research, Nature, 7645(543), p. 402-406, 2017
DOI: 10.1038/nature21698
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High-resolution non-destructive three-dimensional imaging of integrated circuits
Journal article published in 2017 by
Mirko Holler 
,
Manuel Guizar-Sicairos,
Esther H. R. Tsai,
Roberto Dinapoli,
Elisabeth Müller,
Oliver Bunk,
Jörg Raabe,
Gabriel Aeppli
,
Manuel Guizar-Sicairos,
Esther H. R. Tsai,
Roberto Dinapoli,
Elisabeth Müller,
Oliver Bunk,
Jörg Raabe,
Gabriel Aeppli
This paper is made freely available by the publisher.
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