2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
DOI: 10.1109/transducers.2015.7181391
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We present a technique for direct estimation of the conservative and dissipative nonlinearities of symmetric MEMS resonators. The technique is based on measuring the ring-down response, during which the nonlinearities result in an amplitude-dependent frequency and non-exponential decay. Here we show how analysis of the amplitude and phase of the ring-down response allows one to estimate conservative and dissipative nonlinearities, in addition to the linear natural frequency and quality factor, associated with a vibrational mode. The coefficients obtained from the test allow one to predict the nonlinear open and closed loop responses of the resonator.