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2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

DOI: 10.1109/transducers.2015.7181391

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Characterizing Mems Nonlinearities Directly: The Ring-Down Measurements

Proceedings article published in 2015 by P. Polunin, Y. Yang, J. Atalaya, E. Ng, S. Strachan, O. Shoshani ORCID, M. Dykman, S. Shaw, T. Kenny
This paper is available in a repository.
This paper is available in a repository.

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Abstract

We present a technique for direct estimation of the conservative and dissipative nonlinearities of symmetric MEMS resonators. The technique is based on measuring the ring-down response, during which the nonlinearities result in an amplitude-dependent frequency and non-exponential decay. Here we show how analysis of the amplitude and phase of the ring-down response allows one to estimate conservative and dissipative nonlinearities, in addition to the linear natural frequency and quality factor, associated with a vibrational mode. The coefficients obtained from the test allow one to predict the nonlinear open and closed loop responses of the resonator.