Published in
American Institute of Physics, Journal of Applied Physics, 9(105), p. 094910
DOI: 10.1063/1.3117485
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- American Institute of Physics
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Modeling and experiments on diffusion and activation of phosphorus in germanium
Journal article published in 2009 by
P. Tsouroutas,
D. Tsoukalas,
I. Zergioti,
N. Cherkashin 
,
A. Claverie
,
A. Claverie
This paper is available in a repository.
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