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Published in

Beilstein-Institut, Beilstein Journal of Nanotechnology, (8), p. 1532-1545, 2017

DOI: 10.3762/bjnano.8.155

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Parylene C as a versatile dielectric material for organic field-effect transistors

Journal article published in 2017 by Tomasz Marszalek ORCID, Maciej Gazicki-Lipman, Jacek Ulanski
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

An emerging new technology, organic electronics, is approaching the stage of large-scale industrial application. This is due to a remarkable progress in synthesis of a variety of organic semiconductors, allowing one to design and to fabricate, so far on a laboratory scale, different organic electronic devices of satisfactory performance. However, a complete technology requires upgrading of fabrication procedures of all elements of electronic devices and circuits, which not only comprise active layers, but also electrodes, dielectrics, insulators, substrates and protecting/encapsulating coatings. In this review, poly(chloro-para-xylylene) known as Parylene C, which appears to become a versatile supporting material especially suitable for applications in flexible organic electronics, is presented. A synthesis and basic properties of Parylene C are described, followed by several examples of use of parylenes as substrates, dielectrics, insulators, or protecting materials in the construction of organic field-effect transistors.