Published in
Elsevier, Procedia Engineering, (168), p. 1196-1199
DOI: 10.1016/j.proeng.2016.11.409
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Mask-Less Direct-Writing Deposition of Lead-Free Piezoelectric Films for Microsystems
Journal article published in 2016 by
Marco Ferrari 
,
Simone Dalola,
Vittorio Ferrari,
Giulio Cordaro,
Cinzia Cristiani,
Giovanni Dotelli
,
Simone Dalola,
Vittorio Ferrari,
Giulio Cordaro,
Cinzia Cristiani,
Giovanni Dotelli
This paper is made freely available by the publisher.
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