Dissemin is shutting down on January 1st, 2025

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American Institute of Physics, Journal of Applied Physics, 24(119), p. 245105

DOI: 10.1063/1.4954680

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Sputtering of silicon membranes with nanoscale thickness

Journal article published in 2016 by Gerhard Hobler ORCID, Maureen L. Nietiadi ORCID, R. Mark Bradley, Herbert M. Urbassek ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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