Published in
International Congress on Applications of Lasers & Electro-Optics, 2006
DOI: 10.2351/1.5060868
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Analysis of modified layer formation into silicon wafer by permeable nanosecond laser
Proceedings article published in 2006 by
Etsuji Ohmura,
Kenshi Fukumitsu,
Naoki Uchiyama,
Kazuhiro Atsumi,
Masayoshi Kumagai 
,
Hideki Morita
,
Hideki Morita
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