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Analysis of crack propagation in stealth dicing using stress intensity factor

Journal article published in 2010 by E. Ohmura, K. Ogawa, M. Kumagai ORCID, M. Nakano, K. Fukumitsu, H. Morita
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

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