Published in

Institute of Electrical and Electronics Engineers, Journal of Microelectromechanical Systems, 4(25), p. 683-690, 2016

DOI: 10.1109/jmems.2016.2577888

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Titanium Nitride as a Strain Gauge Material

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Preprint: archiving allowed
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Postprint: archiving allowed
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Published version: archiving forbidden
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