Published in
Taylor and Francis Group, Instrumentation Science and Technology, 2(45), p. 137-150
DOI: 10.1080/10739149.2016.1206927
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Ultrasonic response of a piezoelectric aluminum nitride film deposited on silicon
Journal article published in 2016 by
S. Lemlikchi,
M. Asmani,
H. Djelouah,
P. Schaaf 
,
M. Hopfeld,
W. Aouimeur
,
M. Hopfeld,
W. Aouimeur
This paper was not found in any repository, but could be made available legally by the author.
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