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IOP Publishing, Journal of Physics D: Applied Physics, 39(50), p. 395101, 2017

DOI: 10.1088/1361-6463/aa8503

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Structural properties, crystal quality and growth modes of MOCVD-grown AlN with TMAl pretreatment of sapphire substrate

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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