Published in
American Institute of Physics, Journal of Vacuum Science and Technology A, 1(35), p. 01B105, 2017
DOI: 10.1116/1.4966198
Links
Tools
Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties
Journal article published in 2016 by
Oili M. E. Ylivaara,
Lauri Kilpi,
Xuwen Liu,
Sakari Sintonen,
Saima Ali 
,
Mikko Laitinen ,
Jaakko Julin ,
Eero Haimi,
Timo Sajavaara,
Harri Lipsanen,
Simo-Pekka Hannula,
Helena Ronkainen,
Riikka L. Puurunen
,
Mikko Laitinen ,
Jaakko Julin ,
Eero Haimi,
Timo Sajavaara,
Harri Lipsanen,
Simo-Pekka Hannula,
Helena Ronkainen,
Riikka L. Puurunen
This paper is available in a repository.
Full text: Download
Data provided by 