Void-mediated coherency-strain relaxation and impediment of cubic-to-hexagonal transformation in epitaxial metastable metal/semiconductor TiN/Al0.72Sc0.28N multilayers
Journal article published in 2017 by
Magnus Garbrecht 
,
Lars Hultman,
Mohammed H. Fawey,
Timothy D. Sands,
Bivas Saha
,
Lars Hultman,
Mohammed H. Fawey,
Timothy D. Sands,
Bivas Saha
This paper is made freely available by the publisher.
Full text: Download
Data provided by 