Published in
2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC)
DOI: 10.1109/iitc-amc.2016.7507708
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First integration of Ni0.9Co0.1 on pMOS transistors
Proceedings article published in 2016 by
F. Deprat,
F. Nemouchi,
C. Fenouillet-Beranger,
M. Casse,
P.-H. Rodriguez 
,
B. Previtali,
N. Rambal,
V. Delaye,
M. Haond,
M. Mellier,
M. Gregoire,
M. Danielou,
S. Favier,
P. Batude,
M. Vinet
,
B. Previtali,
N. Rambal,
V. Delaye,
M. Haond,
M. Mellier,
M. Gregoire,
M. Danielou,
S. Favier,
P. Batude,
M. Vinet
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