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American Institute of Physics, Journal of Applied Physics, 2(121), p. 025302, 2017

DOI: 10.1063/1.4972963

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Effects of incident N atom kinetic energy on TiN/TiN(001) film growth dynamics: A molecular dynamics investigation

Journal article published in 2017 by D. Edström, D. G. Sangiovanni ORCID, L. Hultman ORCID, I. Petrov, J. E. Greene, V. Chirita ORCID
This paper is available in a repository.
This paper is available in a repository.

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