Published in
American Institute of Physics, Journal of Applied Physics, 1(120), p. 015304, 2016
DOI: 10.1063/1.4955043
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Combining experiment and optical simulation in coherent X-ray nanobeam characterization of Si/SiGe semiconductor heterostructures
Journal article published in 2016 by
J. A. Tilka,
J. Park,
Y. Ahn,
A. Pateras 
,
K. C. Sampson,
D. E. Savage,
J. R. Prance ,
C. B. Simmons,
S. N. Coppersmith,
M. A. Eriksson,
M. G. Lagally,
M. V. Holt,
P. G. Evans
,
K. C. Sampson,
D. E. Savage,
J. R. Prance ,
C. B. Simmons,
S. N. Coppersmith,
M. A. Eriksson,
M. G. Lagally,
M. V. Holt,
P. G. Evans
This paper is available in a repository.
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