Published in
Materials Research Society of Japan, Transactions- Materials Research Society of Japan, 2(42), p. 31-36
DOI: 10.14723/tmrsj.42.31
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Nanoparticles as a Metal Source in Plasma Processes
Journal article published in 2017 by
Stefan Flege,
Ruriko Hatada,
Gennadi Jantsen,
Torsten Walbert,
Wolfgang Ensinger,
Koumei Baba,
Takao Morimura,
Falk Muench 
This paper is made freely available by the publisher.
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