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Dissemin
Padraic Shafer
Wrschka et al., 2000
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@inproceedings{Wrschka2000, author = {Wrschka, P. and Lee, G. and Low, K.-S. and Dev, K. and Dobuzinsky, D. and Conti, R. and Shafer, P.}, month = {jan}, title = {Study on CMP pattern erosion for the integration of a PECVD low k material into the W dual damascene process}, year = {2000} }
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Study on CMP pattern erosion for the integration of a PECVD low k material into the W dual damascene process
Proceedings article published in 2000 by
P. Wrschka
,
G. Lee
,
K.-S. Low
,
K. Dev
,
D. Dobuzinsky
,
R. Conti
,
P. Shafer
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