Increased ordering in the amorphous SiO x due to hyperthermal atomic oxygen
Journal article published in 2005 by
M. Kisa,
W. G. Stratton,
T. K. Minton,
K. Van Benthem 
,
S. J. Pennycook,
P. M. Voyles ,
X. Chen,
L. Li,
J. C. Yang
,
S. J. Pennycook,
P. M. Voyles ,
X. Chen,
L. Li,
J. C. Yang
