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2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2017.7863378

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NanoRIM : Sub-micron Structuring with Reaction Injection Molding

Proceedings article published in 2017 by Reza Zandi Shafagh ORCID, Wouter van der Wijngaart, Tommy Haraldsson
This paper is available in a repository.
This paper is available in a repository.

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Abstract

We report “nanoRIM”, the first reaction injection molding (RIM) replication method for thermosets with demonstrated feature sizes down to 250 nm. NanoRIM constitutes the first scalable manufacturing method for thermoset polymers that allows combining large (> cm) and small (